Fundamentals of microfabrication, Madou, Marc

Автор: Marc J. Madou
Название: Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
ISBN: 0849331803 ISBN-13(EAN): 9780849331800
Издательство: Taylor&Francis
Цена: 44405.00 р.
Наличие на складе: Поставка под заказ.
Описание: Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. It also provides both classroom and self-learners with worked-out example problems.

Автор: Mack
Название: Fundamental Principles of Optical Lithography: The Science of Microfabrication
ISBN: 0470727306 ISBN-13(EAN): 9780470727300
Издательство: Wiley
Рейтинг:
Цена: 9179.00 р.
Наличие на складе: Есть у поставщика Поставка под заказ.

Описание: Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.