Handbook of Silicon Based MEMS Materials and Technologies 2 ed., Veikko Lindroos
Новое издание
Автор: Tilli, Markku Название: Handbook Of Silicon Based Mems Materials And Technologies 3 ed. ISBN: 0128177861 ISBN-13(EAN): 9780128177860 Издательство: Elsevier Science Цена: 39582.00 р. Наличие на складе: Есть у поставщикаПоставка под заказ. Описание:
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies and manufacturing that examines the state-of-the-art, with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, materials characterization techniques, sensors, and multiscale modeling methods of MEMS structures, silicon crystals and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components.
This new edition provides coverage of innovative 3D packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. The new edition includes coverage of new processing techniques, emerging water bonding techniques, and reliability that were not included in the previous edition. A new section on process integration features numerous case studies, showing how MEMS technology is being used in industry.
Автор: Dan Zhang; Bin Wei Название: Advanced Mechatronics and MEMS Devices II ISBN: 3319321781 ISBN-13(EAN): 9783319321783 Издательство: Springer Рейтинг: Цена: 30745.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to 'Advanced Mechatronics and MEMS Devices' (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on:
Fundamental design and working principles on MEMS accelerometersInnovative mobile technologiesForce/tactile sensors developmentControl schemes for reconfigurable robotic systemsInertial microfluidicsPiezoelectric force sensors and dynamic calibration techniques...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intelligent manufacturing.
Автор: Acar, Cenk Shkel, Andrei M. Название: Mems vibratory gyroscopes ISBN: 0387095357 ISBN-13(EAN): 9780387095356 Издательство: Springer Рейтинг: Цена: 23508.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: Offers a foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations.
Автор: Mohamed Gad-El-Hak Название: Mems ISBN: 0849391393 ISBN-13(EAN): 9780849391392 Издательство: Taylor&Francis Рейтинг: Цена: 24499.00 р. Наличие на складе: Поставка под заказ.
Описание: Offers an overview of various MEMS applications. This book surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others.
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