Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting, Xiao-Sheng Zhang

Автор: Chong-Min Kyung
Название: Nano Devices and Circuit Techniques for Low-Energy Applications and Energy Harvesting
ISBN: 940179989X ISBN-13(EAN): 9789401799898
Издательство: Springer
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Цена: 15672.00 р.
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Описание: This book describes the development of core technologies to address two of the most challenging issues in research for future IT platform development, namely innovative device design and reduction of energy consumption.

Автор: Fernando A. Lasagni; Andr?s F. Lasagni
Название: Fabrication and Characterization in the Micro-Nano Range
ISBN: 3642267548 ISBN-13(EAN): 9783642267543
Издательство: Springer
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Цена: 19589.00 р.
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Описание: This update in the field presents micro/nano fabrications techniques of two and three dimensional structures. Several examples are presented, which illustrate the direct application in different technological fields such as microfluidics, photonics, and biotechnology.

Автор: Hans H. Gatzen; Volker Saile; J?rg Leuthold
Название: Micro and Nano Fabrication
ISBN: 3662443945 ISBN-13(EAN): 9783662443941
Издательство: Springer
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Цена: 13060.00 р.
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Описание: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.