Описание: Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
Автор: Ivor Brodie; Julius J. Muray Название: The Physics of Microfabrication ISBN: 1489921621 ISBN-13(EAN): 9781489921628 Издательство: Springer Рейтинг: Цена: 27950.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years.
Автор: Raja Nassar; Weizhong Dai Название: Modelling of Microfabrication Systems ISBN: 3642055362 ISBN-13(EAN): 9783642055362 Издательство: Springer Рейтинг: Цена: 19589.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Автор: Suman Chakraborty Название: Microfluidics and Microfabrication ISBN: 1441915427 ISBN-13(EAN): 9781441915429 Издательство: Springer Рейтинг: Цена: 23508.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: The contributors to this volume discuss the connections between microfluidics, microfabrication and the life sciences. In particular, they analyze the fundamental aspects of fluid mechanics in micro-scale and nano-scale confinements and microfabrication.
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