The Physics of Submicron Lithography, Kamil A. Valiev

Автор: Kamil A. Valiev
Название: The Physics of Submicron Lithography
ISBN: 1461364612 ISBN-13(EAN): 9781461364610
Издательство: Springer
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Описание: In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.

Автор: David K. Ferry; Robert O. Grondin
Название: Physics of Submicron Devices
ISBN: 1461364442 ISBN-13(EAN): 9781461364443
Издательство: Springer
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Описание: First, we must point out that it is not a device book, as a proper treatment of the range of important devices would require a much larger volume even without treating the important physics for submicron devices.

Автор: Hilda A. Cerdeira; B. Kramer; Gerd Sch?n
Название: Quantum Dynamics of Submicron Structures
ISBN: 0792334698 ISBN-13(EAN): 9780792334699
Издательство: Springer
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Описание: Includes quantum interference phenomena, such as the Aharonov-Bohm-like oscillations of the magnetoresistance of thin metallic cylinders and rings, transport through chaotic billiards, and such quantization effects as the integer and fractional quantum Hall effect.