This book contains selected contributions on surface modification to improve the properties of solid materials. The surface properties are tailored either by functionalization, etching, or deposition of a thin coating. Functionalization is achieved by a brief treatment with non-equilibrium gaseous plasma containing suitable radicals that interact chemically with the material surface and thus enable the formation of rather stable functional groups. Etching is performed in order to modify the surface morphology. The etching parameters are selected in such a way that a rich morphology of the surfaces is achieved spontaneously on the sub-micrometer scale, without using masks. The combination of adequate surface morphology and functionalization of materials leads to superior surface properties which are particularly beneficial for the desired response upon incubation with biological matter. Alternatively, the materials are coated with a suitable thin film that is useful in various applications from food to aerospace industries.
