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Materials and Processes for Next Generation Lithography,11, Robinson, Alex


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Автор: Robinson, Alex
Название:  Materials and Processes for Next Generation Lithography,11
ISBN: 9780081003541
Издательство: Elsevier Science
Классификация:

ISBN-10: 0081003544
Обложка/Формат: Hardback
Страницы: 425
Вес: 1.45 кг.
Дата издания: 18.11.2016
Серия: Frontiers of nanoscience
Язык: English
Размер: 235 x 191 x 35
Ссылка на Издательство: Link
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Поставляется из: Европейский союз
Описание: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. . These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. . This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication.


Periodic materials and interference lithography for photonics, phononics and mechanics

Автор: Maldovan
Название: Periodic materials and interference lithography for photonics, phononics and mechanics
ISBN: 3527319999 ISBN-13(EAN): 9783527319992
Издательство: Wiley
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Цена: 28187.00 р.
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Описание: Written by the head of materials science and engineering at MIT, this concise and stringent introduction takes readers from the fundamental theory, via experimentation, to in-depth knowledge. A must-have for both beginners and veterans in the field.

Coaxial Lithography

Автор: Ozel
Название: Coaxial Lithography
ISBN: 3319454137 ISBN-13(EAN): 9783319454139
Издательство: Springer
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Цена: 15672.00 р.
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Описание: This thesis focuses on the electrochemical synthesis of multi-segmented nanowires. In contrast to previous work, which was largely limited to one-dimensional modifications, Tuncay Ozel presents a technique, termed coaxial Lithography (COAL), which allows for the synthesis of coaxial nanowires in a parallel fashion with sub-10 nanometer resolution in both the axial and radial dimensions. This work has significantly expanded current synthetic capabilities with respect to materials generality and the ability to tailor two-dimensional growth in the formation of core-shell structures. These developments have enabled fundamental and applied studies which were not previously possible. The COAL technique will increase the capabilities of many researchers who are interested in studying light-matter interactions, nanoparticle assembly, solution-dispersible nanoparticles and labels, semiconductor device physics and nanowire biomimetic probe preparation. The methodology and results presented in this thesis appeal to researchers in nanomaterial synthesis, plasmonics, biology, photovoltaics, and photocatalysis.

Structural Materials for Generation IV Nuclear Reactors

Автор: Yvon, Pascal
Название: Structural Materials for Generation IV Nuclear Reactors
ISBN: 0081009062 ISBN-13(EAN): 9780081009062
Издательство: Elsevier Science
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Цена: 30991.00 р.
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Описание: Operating at a high level of fuel efficiency, safety, proliferation-resistance, sustainability and cost, generation IV nuclear reactors promise enhanced features to an energy resource which is already seen as an outstanding source of reliable base load power. The performance and reliability of materials when subjected to the higher neutron doses and extremely corrosive higher temperature environments that will be found in generation IV nuclear reactors are essential areas of study, as key considerations for the successful development of generation IV reactors are suitable structural materials for both in-core and out-of-core applications. Structural Materials for Generation IV Nuclear Reactors explores the current state-of-the art in these areas.Part One reviews the materials, requirements and challenges in generation IV systems. Part Two presents the core materials with chapters on irradiation resistant austenitic steels, ODS/FM steels and refractory metals amongst others. Part Three looks at out-of-core materials. Structural Materials for Generation IV Nuclear Reactors is an essential reference text for professional scientists, engineers and postgraduate researchers involved in the development of generation IV nuclear reactors.

Nanoscale Thermoelectric Materials: Thermal and Electrical Transport, and Applications to Solid-State Cooling and Power Generation

Автор: Beckman
Название: Nanoscale Thermoelectric Materials: Thermal and Electrical Transport, and Applications to Solid-State Cooling and Power Generation
ISBN: 1605115207 ISBN-13(EAN): 9781605115207
Издательство: Cambridge Academ
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Описание: At the Material Research Society Spring 2013 meeting, held in San Francisco April 1-5, 2013, three symposia were held focusing on thermal-to-electric energy conversion and thermal transport: Symposium H: Nanoscale Thermoelectrics - Materials and Transport Phenomena - II, Symposium I: Materials for Solid-State Refrigeration, and Symposium V: Nanoscale Heat Transport - From Fundamentals to Devices.


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