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Chemical Vapor Deposition (CVD): Methods and Technologies, Levi Karlsson


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Автор: Levi Karlsson
Название:  Chemical Vapor Deposition (CVD): Methods and Technologies
ISBN: 9781536199499
Издательство: Nova Science
Классификация:

ISBN-10: 1536199494
Обложка/Формат: Hardback
Страницы: 208
Вес: 0.42 кг.
Дата издания: 17.08.2021
Серия: Chemistry
Язык: English
Размер: 157 x 231 x 20
Читательская аудитория: General (us: trade)
Ключевые слова: Chemistry
Подзаголовок: Methods and technologies
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Поставляется из: Англии
Описание: Chemical vapor deposition (CVD) refers to a vacuum deposition method used to produce high quality, high-performance, solid materials in a variety of manufacturing industries. Chapter One provides a critical review of published experimental data for thin films of silicon nitride deposited by thermal and plasma CVD, plasma CVD, high density plasma CVD, atomic layer-by-layer deposition, and hot-wire CVD. Chapter Two describes several aspects of the use of CVD for single-crystal diamond synthesis for electronics. Chapter Three describes the properties of graphene and its preparation by a number of methods with a focus on the classical CVD method on copper foil together with graphene transfer onto a dielectric substrate.


Theory and Application of Laser Chemical Vapor Deposition

Автор: J. Mazumder; Aravinda Kar
Название: Theory and Application of Laser Chemical Vapor Deposition
ISBN: 0306449366 ISBN-13(EAN): 9780306449369
Издательство: Springer
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Цена: 30039.00 р.
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Описание: In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption.

Modeling of Chemical Vapor Deposition of Tungsten Films

Автор: Chris R. Kleijn; Christoph Werner
Название: Modeling of Chemical Vapor Deposition of Tungsten Films
ISBN: 3034877439 ISBN-13(EAN): 9783034877435
Издательство: Springer
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Цена: 6986.00 р.
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Описание: Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors.

Magneto Luminous Chemical Vapor Deposition

Автор: Yasuda Hirotsugu
Название: Magneto Luminous Chemical Vapor Deposition
ISBN: 1439838771 ISBN-13(EAN): 9781439838778
Издательство: Taylor&Francis
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Цена: 39811.00 р.
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Описание:

The magneto luminous chemical vapor deposition (MLCVD) method is the perfect example of the "front-end green process." It employs an entirely new process that expends the minimum amount of materials in gas phase, yields virtually no effluent, and therefore requires no environmental remediation. Unlike the "back-end green process," which calls for add-on processes to deal with effluent problems, the newer MLCVD approach is a completely different phenomenon that has never been adequately described, until now.

Dispelling previous misconceptions and revealing new areas for investigation, Magneto Luminous Chemical Vapor Deposition describes the key process of dielectric breakdown of gas molecules under the influence of a magnetic field. It emphasizes behavioral distinctions between molecular gasses that cause plasma polymerization (such as methane and trimethylsilane) and mono-atomic gases (e.g., helium and argon) when dealing with the dielectric breakdown of the gas phase under low pressure. The author also reveals his minimum perturbation theory of biocompatibility. This is based on the realization that nanofilms prepared using MLCVD have unique, stable interfacial characteristics necessary to achieve a surface that can be tolerated in various biological environments.

The author presents alternating views based on NASA's recent discovery that a magnetic field burst from the earth triggers the inception of the aurora borealis. Detailing similarities between this phenomenon and the inception of the magneto luminous gas phase described in this book, the author proposes that proof of the one occurrence could shed light on the other. Expanding on the author's previous works, this book introduces new discoveries, highlights the newfound errors of previous assumptions, and juxtaposes many cutting-edge alternative views and anomalies associated with the field.

Chemical Vapor Deposition of Thin Films for Diffusion Barrier Applications

Автор: Bchir Omar
Название: Chemical Vapor Deposition of Thin Films for Diffusion Barrier Applications
ISBN: 0530008319 ISBN-13(EAN): 9780530008318
Издательство: Неизвестно
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Цена: 17105.00 р.
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Описание: Abstract:

PhD Dissertation: MOCVD of WNx

Dissertation Discovery Company and University of Florida are dedicated to making scholarly works more discoverable and accessible throughout the world. This dissertation, "Chemical Vapor Deposition of Thin Films for Diffusion Barrier Applications" by Omar James Bchir, was obtained from University of Florida and is being sold with permission from the author. A digital copy of this work may also be found in the university's institutional repository, IR@UF. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation.

Chemical Vapor Deposition Growth and Characterization of Two-Dimensional Hexagonal Boron Nitride

Автор: Tay
Название: Chemical Vapor Deposition Growth and Characterization of Two-Dimensional Hexagonal Boron Nitride
ISBN: 981108808X ISBN-13(EAN): 9789811088087
Издательство: Springer
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Цена: 15372.00 р.
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Описание: This thesis focuses on the growth of a new type of two-dimensional (2D) material known as hexagonal boron nitride (h-BN) using chemical vapor deposition (CVD). This came as a major surprise to many working in the 2D field, as it had been generally assumed that hexagonal-shaped h-BN was impossible due to energy dynamics.

Chemical Vapor Deposition of Thin Films for Diffusion Barrier Applications

Автор: Bchir Omar
Название: Chemical Vapor Deposition of Thin Films for Diffusion Barrier Applications
ISBN: 0530008300 ISBN-13(EAN): 9780530008301
Издательство: Неизвестно
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Цена: 12139.00 р.
Наличие на складе: Есть у поставщика Поставка под заказ.

Описание: Abstract:

PhD Dissertation: MOCVD of WNx

Dissertation Discovery Company and University of Florida are dedicated to making scholarly works more discoverable and accessible throughout the world. This dissertation, "Chemical Vapor Deposition of Thin Films for Diffusion Barrier Applications" by Omar James Bchir, was obtained from University of Florida and is being sold with permission from the author. A digital copy of this work may also be found in the university's institutional repository, IR@UF. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation.

Chemical Vapor Deposition

Автор: Srinivasan Sivaram
Название: Chemical Vapor Deposition
ISBN: 1475747535 ISBN-13(EAN): 9781475747539
Издательство: Springer
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Цена: 14365.00 р.
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Описание: Later Van Nostrand agreed to publish my book as a text intended for students at the senior/first year graduate level and for process engineers in the microelectronics industry, This book is not intended to be bibliographical, and it does not cover every new material being studied for chemical vapor deposition.

Chemical Vapor Deposition Polymerization

Автор: Jeffrey B. Fortin; Toh-Ming Lu
Название: Chemical Vapor Deposition Polymerization
ISBN: 1441954139 ISBN-13(EAN): 9781441954138
Издательство: Springer
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Цена: 16977.00 р.
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Principles of Chemical Vapor Deposition

Автор: D.M. Dobkin; M.K. Zuraw
Название: Principles of Chemical Vapor Deposition
ISBN: 9048162777 ISBN-13(EAN): 9789048162772
Издательство: Springer
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Цена: 19589.00 р.
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Описание:

Do you work with chemical Vapor deposition processes or reactors? Have you ever wondered what goes on inside the chamber or how the deposition processes work? If the answer to this is yes, then Principles of Chemical Vapor Deposition is for you

Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment.

This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.

This book will be invaluable to process engineers, graduate students and researchers newly involved in the development of processes and hardware for chemical vapor deposition. In addition, the book is appropriate for senior level undergraduates or graduate courses on chemical vapor deposition as well as semiconductor manufacturing and coating technologies.

Magneto Luminous Chemical Vapor Deposition

Автор: Yasuda
Название: Magneto Luminous Chemical Vapor Deposition
ISBN: 1138072095 ISBN-13(EAN): 9781138072091
Издательство: Taylor&Francis
Рейтинг:
Цена: 16078.00 р.
Наличие на складе: Есть у поставщика Поставка под заказ.

Описание:

The magneto luminous chemical vapor deposition (MLCVD) method is the perfect example of the "front-end green process." It employs an entirely new process that expends the minimum amount of materials in gas phase, yields virtually no effluent, and therefore requires no environmental remediation. Unlike the "back-end green process," which calls for add-on processes to deal with effluent problems, the newer MLCVD approach is a completely different phenomenon that has never been adequately described, until now.

Dispelling previous misconceptions and revealing new areas for investigation, Magneto Luminous Chemical Vapor Deposition describes the key process of dielectric breakdown of gas molecules under the influence of a magnetic field. It emphasizes behavioral distinctions between molecular gasses that cause plasma polymerization (such as methane and trimethylsilane) and mono-atomic gases (e.g., helium and argon) when dealing with the dielectric breakdown of the gas phase under low pressure. The author also reveals his minimum perturbation theory of biocompatibility. This is based on the realization that nanofilms prepared using MLCVD have unique, stable interfacial characteristics necessary to achieve a surface that can be tolerated in various biological environments.

The author presents alternating views based on NASA's recent discovery that a magnetic field burst from the earth triggers the inception of the aurora borealis. Detailing similarities between this phenomenon and the inception of the magneto luminous gas phase described in this book, the author proposes that proof of the one occurrence could shed light on the other. Expanding on the author's previous works, this book introduces new discoveries, highlights the newfound errors of previous assumptions, and juxtaposes many cutting-edge alternative views and anomalies associated with the field.


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