Materials & Process Integration for MEMS, Francis E. H. Tay

Автор: Veikko Lindroos
Название: Handbook of Silicon Based MEMS Materials and Technologies 2 ed.
ISBN: 0323299652 ISBN-13(EAN): 9780323299657
Издательство: Elsevier Science
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The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS.

Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.

Автор: Thomas M. Adams; Richard A. Layton
Название: Introductory MEMS
ISBN: 1489984216 ISBN-13(EAN): 9781489984210
Издательство: Springer
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Цена: 11179.00 р.
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Описание: Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.

Автор: Barton C. Prorok; LaVern Starman; Jennifer Hay; Go
Название: MEMS and Nanotechnology, Volume 8
ISBN: 3319360914 ISBN-13(EAN): 9783319360911
Издательство: Springer
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Цена: 19589.00 р.
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Описание: MEMS and Nanotechnology, Volume 8: Proceedings of the 2014 Annual Conference on Experimental and Applied Mechanics, the eighth volume of eight from the Conference, brings together contributions to this important area of research and engineering.

Автор: Gordon A. Shaw; Barton C. Prorok; LaVern A. Starma
Название: MEMS and Nanotechnology, Volume 6
ISBN: 1489995153 ISBN-13(EAN): 9781489995155
Издательство: Springer
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Цена: 23508.00 р.
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Описание: MEMS and Nanotechnology, Volume 6 Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics represents one of seven volumes of technical papers presented at the Society for Experimental Mechanics SEM 12th International Congress & Exposition on Experimental and Applied Mechanics, held at Costa Mesa, California, June 11-14, 2012. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Challenges in Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials, Imaging Methods for Novel Materials and Challenging Applications, Experimental and Applied Mechanics, Mechanics of Biological Systems and Materials and, Composite Materials and Joining Technologies for Composites.

Автор: Francis E. H. Tay
Название: Materials & Process Integration for MEMS
ISBN: 1441953035 ISBN-13(EAN): 9781441953032
Издательство: Springer
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Цена: 30606.00 р.
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Описание: Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.

Автор: Jason J. Gorman; Benjamin Shapiro
Название: Feedback Control of MEMS to Atoms
ISBN: 1489988912 ISBN-13(EAN): 9781489988911
Издательство: Springer
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Цена: 25853.00 р.
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Описание: The use of control and control systems are an essential part of functioning integrated systems. Feedback Control Systems for Micro- and Nano-Scales shows how feedback control in nanotechnology instrumentation can yield results better than passive systems can.

Автор: Uttamchandani, Deepak
Название: Application of MEMS for Wireless and Mobile networks
ISBN: 0081004494 ISBN-13(EAN): 9780081004494
Издательство: Elsevier Science
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Цена: 23580.00 р.
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Wireless MEMS Networks and Applications reviews key emerging applications of MEMS in wireless and mobile networks. This book covers the different types of wireless MEMS devices, also exploring MEMS in smartphones, tablets, and the MEMS used for energy harvesting.