The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS.
The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components.
Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.
Автор: Pilar Gonzalez Ruiz; Kristin De Meyer; Ann Witvrou Название: Poly-SiGe for MEMS-above-CMOS Sensors ISBN: 9400767986 ISBN-13(EAN): 9789400767980 Издательство: Springer Рейтинг: Цена: 16769.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ГЇВїВЅ ГЇВїВЅm Cu-backend CMOS.
Автор: Francis E. H. Tay Название: Materials & Process Integration for MEMS ISBN: 1402071752 ISBN-13(EAN): 9781402071751 Издательство: Springer Рейтинг: Цена: 30606.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание: Offers the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications). This title is suitable for academics and professionals who are active in the field of MEMS.
Автор: Uttamchandani, Deepak Название: Application of MEMS for Wireless and Mobile networks ISBN: 0081004494 ISBN-13(EAN): 9780081004494 Издательство: Elsevier Science Рейтинг: Цена: 23580.00 р. Наличие на складе: Есть у поставщика Поставка под заказ.
Описание:
Wireless MEMS Networks and Applications reviews key emerging applications of MEMS in wireless and mobile networks. This book covers the different types of wireless MEMS devices, also exploring MEMS in smartphones, tablets, and the MEMS used for energy harvesting.
The book reviews the range of applications of wireless MEMS networks in manufacturing, infrastructure monitoring, environmental monitoring, space applications, agricultural monitoring for food safety, health applications, and systems for smart cities.
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