Ryu, Yu Kyoung Rodrigo, Javier Martinez Scanning probe lithography 9781032122144

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Автор: Ryu, Yu Kyoung Rodrigo, Javier Martinez (Ю Кьонг Рю)
Название: Scanning probe lithography
Перевод названия: Ю Кьонг Рю: Сканирующая зондовая литография
ISBN: 9781032122144
Издательство: Taylor&Francis
Классификация:

Нанотехнология

Биохимическая инженерия

Машиноведение

Материаловедение

Электротехническое машиностроение

Электроника

Лазерные технологии и голография

ISBN-10: 1032122145
Обложка/Формат: Hardback
Страницы: 128
Вес: 0.33 кг.
Дата издания: 22.12.2022
Серия: Emerging materials and technologies
Язык: English
Иллюстрации: 17 line drawings, black and white; 43 halftones, black and white; 60 illustrations, black and white
Размер: 162 x 240 x 14
Подзаголовок: Fundamentals, materials, and applications
Рейтинг:
Поставляется из: Европейский союз
Описание: The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials.• Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.
Дополнительное описание: 1. Historical Background and Positioning in the Lithography Roadmap. 2. Basic Concepts and Modalities. 3. Mechanical Scanning Probe Lithography. 4. Dip Pen Nanolithography. 5. Field Emission Scanning Probe Lithography. 6. Oxidation Scanning Probe Lithogra

Scanning probe lithography, Ryu, Yu Kyoung Rodrigo, Javier Martinez